Gyeonggi-do
South Korea
2
2012-02-16
The entities that hold a legal rights for patent applications filed by inventor CHAE Heeyeop:
Heeyeop CHAE from Gyeonggi-do, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method
#2 | 2009-01-29Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method
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