Nirasaki
Japan
3
2015-09-10
The entities that hold a legal rights for patent applications filed by inventor Kimura Hidetoshi:
Hidetoshi Kimura from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method
#2 | 2012-03-15Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method
#3 | 2005-09-22Electrostatic chuck
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