Tsuyoshi Hida

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2015-09-10

Top Assignees for applications by Tsuyoshi Hida

The entities that hold a legal rights for patent applications filed by inventor Hida Tsuyoshi:

Tsuyoshi Hida from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method

Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method

Electrostatic chuck and manufacturing method thereof

InventorID:

3118420 ⎘