Jun Ogawa

City:

Iwate

Country:

Japan

Published Applications:

Last publication date:

2014-01-09

Top Assignees for applications by Jun Ogawa

The entities that hold a legal rights for patent applications filed by inventor Ogawa Jun:

Jun Ogawa from Iwate, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Film deposition method

Film deposition method

Apparatus and method of forming thin film including adsorption step and reaction step

Substrate processing apparatus, substrate processing method, and computer-readable storage medium

InventorID:

312735 ⎘