Austin, Texas
United States
5
2017-04-11
The entities that hold a legal rights for patent applications filed by inventor Wagner Mark I.:
Mark I. Wagner from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods for preventing precipitation of etch byproducts during an etch process and/or subsequent rinse process
#2 | 2012-05-10Methods and apparatus for displacing fluids from substrates using supercritical CO2
#3 | 2010-07-22Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process
#4 | 2010-03-25Methods and systems for preventing feature collapse during microelectronic topography fabrication
#5 | 2010-03-25Method and system of drying a microelectronic topography
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