Nirasaki
Japan
13
2013-01-17
The entities that hold a legal rights for patent applications filed by inventor Itoh Hitoshi:
Hitoshi Itoh from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Film forming method and film forming apparatus
#2 | 2012-07-19Dry cleaning method of substrate processing apparatus
#3 | 2012-05-31Film forming method, pretreatment device, and processing system
#4 | 2012-05-17Semiconductor device manufacturing method
#5 | 2012-03-22Plasma generating apparatus, plasma processing apparatus and plasma processing method
#6 | 2011-09-29Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and storage medium
#7 | 2011-03-03Method of manufacturing semiconductor device, semiconductor device, electronic instrument, semiconductor manufacturing apparatus, and storage medium
#8 | 2010-12-23Metal oxide film formation method and apparatus
#9 | 2010-09-16Semiconductor device manufacturing method
#10 | 2010-08-19Manufacturing method of semiconductor device
#11 | 2010-06-10Film forming method and film forming apparatus
#12 | 2010-01-21Film forming method and apparatus, and storage medium
#13 | 2008-01-03Film formation method and apparatus
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