Ulm
Germany
6
2012-06-21
The entities that hold a legal rights for patent applications filed by inventor Zenzinger Markus:
Markus Zenzinger from Ulm, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE
#2 | 2011-03-24Microlithographic exposure method as well as a projection exposure system for carrying out the method
#3 | 2009-02-12Microlithographic exposure method as well as a projection exposure system for carrying out the method
#4 | 2007-11-15Illumination System for a Microlithography Projection Exposure Installation
#5 | 2006-09-14Method for improving the optical polarization properties of a microlithographic projection exposure apparatus
#6 | 2005-07-07Microlithographic exposure method as well as a projection exposure system for carrying out the method
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