Oberkochen
Germany
2
2009-02-12
2
2010-12-07
These are the the leading inventors for applications assigned to Carl Zeiss:
Carl Zeiss based in Oberkochen, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Microlithographic exposure method as well as a projection exposure system for carrying out the method
#2 | 2006-02-02 ✅ Patent 7,423,765 granted on 2008-09-09Optical system of a microlithographic projection exposure apparatus
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