Incheon
South Korea
12
2023-03-30
The entities that hold a legal rights for patent applications filed by inventor JOO Won-Don:
Won-Don JOO from Incheon, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS FOR SUBSTRATE DICING AND METHOD THEROF
#2 | 2020-05-28Method of testing an interconnection substrate and apparatus for performing the same
#3 | 2020-03-19Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same
#4 | 2020-03-12Plasma sensing device, plasma monitoring system and method of controlling plasma processes
#5 | 2019-05-16Maskless exposure method, maskless exposure apparatus and method of manufacturing a semiconductor device using the same
#6 | 2018-03-15DEFECT INSPECTION SYSTEM, METHOD OF INSPECTING DEFECTS, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE METHOD
#7 | 2017-09-14Maskless lithographic apparatus measuring accumulated amount of light
#8 | 2017-04-20Plasma light source apparatus and light source system including the same
#9 | 2014-08-28Light source device and semiconductor manufacturing apparatus including the same
#10 | 2013-08-22SYSTEM AND METHOD FOR PROVIDING LIGHT
#11 | 2013-08-15Reflector structure of illumination optic system
#12 | 2013-07-04Broadband light illuminators
320026 ⎘