Nirasaki City
Japan
4
2012-08-16
The entities that hold a legal rights for patent applications filed by inventor Abe Jun:
Jun Abe from Nirasaki City, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Temperature measurement apparatus and method
#2 | 2010-09-30Substrate processing apparatus and substrate processing method using same
#3 | 2010-08-19Plasma processing apparatus and temperature measuring method and apparatus used therein
#4 | 2009-09-10Temperature measurement apparatus and method
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