Campbell, California
United States
6
2012-08-23
The entities that hold a legal rights for patent applications filed by inventor Kim Eui Kyoon:
Eui Kyoon Kim from Campbell, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDGE ETCHING
#2 | 2011-05-12PLASMA SURFACE TREATMENT TO PREVENT PATTERN COLLAPSE IN IMMERSION LITHOGRAPHY
#3 | 2009-08-06ELIMINATION OF PHOTORESIST MATERIAL COLLAPSE AND POISONING IN 45-NM FEATURE SIZE USING DRY OR IMMERSION LITHOGRAPHY
#4 | 2009-04-23PLASMA SURFACE TREATMENT TO PREVENT PATTERN COLLAPSE IN IMMERSION LITHOGRAPHY
#5 | 2009-01-15APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE EDGE REGION
#6 | 2009-01-15Systems for plasma enhanced chemical vapor deposition and bevel edge etching
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