Portland, Oregon
United States
13
2020-07-16
The entities that hold a legal rights for patent applications filed by inventor Breiling Patrick:
Patrick Breiling from Portland, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Planar substrate edge contact with open volume equalization pathways and side containment
#2 | 2020-07-09Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
#3 | 2019-08-01Electrostatic chucking pedestal with substrate backside purging and thermal sinking
#4 | 2018-11-22Wafer Edge Contact Hardware and Methods to Eliminate Deposition at Wafer Backside Edge and Notch
#5 | 2018-06-21Conical wafer centering and holding device for semiconductor processing
#6 | 2018-05-03Planar substrate edge contact with open volume equalization pathways and side containment
#7 | 2014-08-07Method and apparatus for purging and plasma suppression in a process chamber
#8 | 2013-07-04In-situ deposition of film stacks
#9 | 2011-09-29In-situ deposition of film stacks
#10 | 2010-02-11Method and apparatus for electroplating
#11 | 2010-02-11Method and apparatus for electroplating including remotely positioned second cathode
#12 | 2007-05-10Active rinse shield for electrofill chemical bath and method of use
#13 | 2006-12-12Active rinse shield for electrofill chemical bath and method of use
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