Sunnyvale, California
United States
3
2012-09-06
The entities that hold a legal rights for patent applications filed by inventor Williams Scott M.:
Scott M. Williams from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method extending the service interval of a gas distribution plate
#2 | 2012-09-06Method for removing halogen-containing residues from substrate
#3 | 2011-12-15METHODS FOR REMOVING BYPRODUCTS FROM LOAD LOCK CHAMBERS
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