Eindhoven
Netherlands
10
2012-10-25
The entities that hold a legal rights for patent applications filed by inventor Haast Marc Antonius Maria:
Marc Antonius Maria Haast from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
#2 | 2011-10-27Method and system for determining a suppression factor of a suppression system and a lithographic apparatus
#3 | 2010-04-15LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#4 | 2009-01-22Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
#5 | 2008-12-25Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
#6 | 2008-01-10Sensor for use in a lithographic apparatus
#7 | 2007-05-17Lithographic apparatus and sensor therefor
#8 | 2006-10-12Lithographic apparatus and device manufacturing method
#9 | 2006-08-31Sensor for use in a lithographic apparatus
#10 | 2006-05-25Lithographic apparatus and device manufacturing method
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