Takehiro UEDA

City:

Yamanashi

Country:

Japan

Published Applications:

Last publication date:

2015-03-26

Top Assignees for applications by Takehiro UEDA

The entities that hold a legal rights for patent applications filed by inventor UEDA Takehiro:

Takehiro UEDA from Yamanashi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Plasma processor and plasma processing method

Plasma processor and plasma processing method

Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism

Plasma processor and plasma processing method

InventorID:

330281 ⎘