Sergey Churilov

City:

Troitsk

Country:

Russian Federation

Published Applications:

Last publication date:

2011-02-24

Top Assignees for applications by Sergey Churilov

The entities that hold a legal rights for patent applications filed by inventor Churilov Sergey:

Sergey Churilov from Troitsk, RU has applied for patents for these inventions. The list has both pending applications and granted patents:

TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD USING THE SAME

InventorID:

3343475 ⎘