Koshi
Japan
29
2019-11-07
The entities that hold a legal rights for patent applications filed by inventor Kitano Takahiro:
Takahiro Kitano from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers
#2 | 2018-09-20Substrate processing method and computer storage medium
#3 | 2018-01-18Pattern forming method and heating apparatus
#4 | 2017-10-05Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers
#5 | 2017-05-11Substrate treatment method, computer readable storage medium and substrate treatment system
#6 | 2016-10-27Substrate cleaning method
#7 | 2016-10-06Pattern forming method and heating apparatus
#8 | 2016-05-05Substrate treatment method, computer storage medium and substrate treatment system
#9 | 2015-09-10Substrate treatment method, computer storage medium, and substrate treatment system
#10 | 2015-03-12Pattern forming method, pattern forming apparatus, and non-transitory computer-readable storage medium
#11 | 2015-03-05Pattern forming method, pattern forming apparatus, and computer readable storage medium
#12 | 2012-11-29Coating method
#13 | 2012-08-23Coating method
#14 | 2012-04-26Imprint system for performing a treatment on a template
#15 | 2012-03-29Imprint system, imprint method, and non-transitory computer storage medium
#16 | 2011-05-19Template treatment method, program, computer storage medium, template treatment apparatus and imprint system
#17 | 2011-02-24Hydrophobicizing apparatus, hydrophobicizing method and storage medium
#18 | 2010-08-26Developing apparatus and developing method
#19 | 2009-11-19Coating apparatus and method
#20 | 2009-11-19Coating apparatus and method
#21 | 2009-08-20Adhesion promoting process, adhesion promoting device, coating and developing system and storage medium
#22 | 2008-12-11Developing apparatus and developing method
#23 | 2008-08-07Heating apparatus and heating method
#24 | 2008-07-17Heating device, coating and developing system, heating method and storage medium
#25 | 2008-07-10Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium
#26 | 2008-06-12Heat treatment device
#27 | 2007-03-01Heating apparatus, and coating and developing apparatus
#28 | 2007-02-08Developing treatment apparatus and developing treatment method
#29 | 2006-09-28Heating apparatus, coating and development apparatus, and heating method
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