Nirasaki
Japan
25
2020-04-09
The entities that hold a legal rights for patent applications filed by inventor Iwata Manabu:
Manabu Iwata from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing apparatus and method
#2 | 2017-02-02Plasma processing apparatus and method
#3 | 2016-12-29Plasma processing apparatus and method
#4 | 2014-05-08Plasma processing apparatus and method
#5 | 2012-06-14Plasma processing apparatus and plasma processing method
#6 | 2012-06-14Plasma processing apparatus and method
#7 | 2011-11-10Plasma processing apparatus and method
#8 | 2011-03-03Chamber cleaning method
#9 | 2010-07-15Plasma processing apparatus and method of controlling distribution of a plasma therein
#10 | 2010-05-27Plasma processing apparatus and method
#11 | 2010-01-07In-chamber member temperature control method, in-chamber member, substrate mounting table and plasma processing apparatus including same
#12 | 2009-10-01Plasma processing apparatus and plasma etching method
#13 | 2009-10-01Plasma processing apparatus
#14 | 2009-09-10Plasma processing apparatus and method
#15 | 2009-08-20Plasma processing apparatus and method, and storage medium
#16 | 2009-05-05Plasma processing apparatus
#17 | 2009-04-23Plasma processing apparatus
#18 | 2009-01-29Plasma processing apparatus and method of plasma distribution correction
#19 | 2007-10-11Plasma processing apparatus
#20 | 2007-10-11Plasma processing apparatus and plasma processing method
#21 | 2007-10-04Plasma processing method and plasma processing apparatus
#22 | 2007-10-04Plasma processing apparatus and plasma processing method
#23 | 2006-03-30Plasma processing apparatus and method
#24 | 2006-02-23Plasma processing apparatus and method
#25 | 2006-02-23Plasma processing apparatus and method
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