Nirasaki
Japan
11
2013-05-16
The entities that hold a legal rights for patent applications filed by inventor Abe Jun:
Jun Abe from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing apparatus, plasma processing method and storage medium
#2 | 2012-09-06Temperature measuring apparatus and temperature measuring method
#3 | 2012-08-16Temperature measurement apparatus and method
#4 | 2011-09-08Plasma processing apparatus and shower head
#5 | 2011-03-24Plasma processing apparatus and shower head
#6 | 2011-03-17Plasma processing apparatus
#7 | 2010-09-30Substrate processing apparatus and substrate processing method using same
#8 | 2010-08-19Plasma processing apparatus and temperature measuring method and apparatus used therein
#9 | 2009-09-10Temperature measurement apparatus and method
#10 | 2009-08-06Substrate plasma processing apparatus and plasma processing method
#11 | 2008-12-11Temperature measuring apparatus and temperature measuring method
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