Koshi
Japan
8
2018-03-08
The entities that hold a legal rights for patent applications filed by inventor Minamida Junya:
Junya Minamida from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate liquid processing apparatus
#2 | 2016-05-05Substrate liquid processing apparatus
#3 | 2016-05-05Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method
#4 | 2016-05-05Substrate processing apparatus
#5 | 2015-07-02Substrate processing apparatus
#6 | 2011-05-05Substrate processing apparatus
#7 | 2009-06-18Substrate processing system
#8 | 2007-11-22Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program
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