Altenstadt
Germany
5
2011-05-05
The entities that hold a legal rights for patent applications filed by inventor SCHAEFER Michael:
Michael SCHAEFER from Altenstadt, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE TRANSPORT SYSTEM AND METHOD
#2 | 2011-03-10MECHANICAL MODULARITY CHAMBERS
#3 | 2010-04-29ROTATABLE SPUTTER TARGET BACKING CYLINDER, ROTATABLE SPUTTER TARGET, METHOD OF PRODUCING A ROTATABLE SPUTTER TARGET, AND COATING INSTALLATION
#4 | 2010-04-29ROTATABLE SPUTTER TARGET BACKING CYLINDER, ROTATABLE SPUTTER TARGET, METHODS OF PRODUCING AND RESTORING A ROTATABLE SPUTTER TARGET, AND COATING INSTALLATION
#5 | 2008-08-07Process chamber, inline coating installation and method for treating a substrate
3374904 ⎘