Aalen
Germany
19
2011-05-12
The entities that hold a legal rights for patent applications filed by inventor Kraehmer Daniel:
Daniel Kraehmer from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Polarization-modulating optical element and method for manufacturing thereof
#2 | 2011-03-24Microlithographic exposure method as well as a projection exposure system for carrying out the method
#3 | 2010-06-01Method for describing, evaluating and improving optical polarization properties of a microlithographic projection exposure apparatus
#4 | 2009-02-12Microlithographic exposure method as well as a projection exposure system for carrying out the method
#5 | 2008-08-21Optical System, In Particular Objective Or Illumination System For A Microlithographic Projection Exposure Apparatus
#6 | 2008-02-28PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
#7 | 2008-02-21Projection objective of a microlithographic projection exposure apparatus
#8 | 2008-01-03Projection exposure apparatus and method for operating the same
#9 | 2007-10-18Objective with crystal lenses
#10 | 2007-09-13Polarization-modulating optical element and method for manufacturing thereof
#11 | 2007-08-23Projection exposure apparatus
#12 | 2007-01-11Optical element, in particular for an objective or an illumination system of a microlithographic projection exposure apparatus
#13 | 2006-10-26Optical system of a projection exposure apparatus
#14 | 2006-05-25Method of determining lens materials for a projection exposure apparatus
#15 | 2005-09-15Objective with birefringent lenses
#16 | 2005-07-21Objective with crystal lenses
#17 | 2005-07-07Optical system and method for the production of micro-structured components by microlithography
#18 | 2005-07-07Microlithographic exposure method as well as a projection exposure system for carrying out the method
#19 | 2005-05-05Optical system with birefringent optical elements
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