Eindhoven
Netherlands
12
2026-04-16
The entities that hold a legal rights for patent applications filed by inventor Patel Hrishikesh:
Hrishikesh Patel from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS
#2 | 2024-01-25Pellicle and pellicle assembly
#3 | 2023-11-16RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS
#4 | 2022-04-21Pellicle and pellicle assembly
#5 | 2020-07-02Pellicle and pellicle assembly
#6 | 2020-04-23Radiation Source Module and Lithographic Apparatus
#7 | 2017-07-27Lithographic apparatus and a device manufacturing method
#8 | 2013-01-03Radiation conduit for radiation source
#9 | 2011-09-29HEAT PIPE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#10 | 2011-07-28Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
#11 | 2011-01-20Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method
#12 | 2011-01-13Fluid handling structure, lithographic apparatus and device manufacturing method
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