Eindhoven
Netherlands
4
2011-11-10
The entities that hold a legal rights for patent applications filed by inventor Badam Vijay Kumar:
Vijay Kumar Badam from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#2 | 2011-08-18Lithographic apparatus, removable member and device manufacturing method
#3 | 2011-05-19Lithographic apparatus, removable member and device manufacturing method
#4 | 2010-06-24Lithographic apparatus and device manufacturing method
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