Koshi
Japan
12
2023-03-23
The entities that hold a legal rights for patent applications filed by inventor Kosugi Hitoshi:
Hitoshi Kosugi from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
System and methods for wafer drying
#2 | 2021-09-16System and methods for wafer drying
#3 | 2020-07-23Substrate processing method and substrate processing apparatus
#4 | 2018-08-02Substrate liquid treatment apparatus
#5 | 2011-06-16Substrate processing method, computer-readable storage medium and substrate processing system
#6 | 2011-05-19Photoresist coating and developing apparatus, substrate transfer method and interface apparatus
#7 | 2008-08-28Coating/developing apparatus and pattern forming method
#8 | 2008-05-22Film forming method, film forming apparatus and pattern forming method
#9 | 2008-04-17Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium
#10 | 2008-02-14Pattern forming method and apparatus
#11 | 2008-02-14Method and system for determining condition of process performed for coating film before immersion light exposure
#12 | 2008-01-24Circulation system for high refractive index liquid in pattern forming apparatus
3386291 ⎘