Hiroshi Tsujimoto

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2014-02-20

Top Assignees for applications by Hiroshi Tsujimoto

The entities that hold a legal rights for patent applications filed by inventor Tsujimoto Hiroshi:

Hiroshi Tsujimoto from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus

Substrate processing method and substrate processing apparatus

Plasma processing apparatus

Substrate processing apparatus, method for measuring distance between electrodes, and storage medium storing program

Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generated

Plasma processing method and apparatus

Etching method and etching apparatus

Method and apparatus for manufacturing semiconductor device, control program and computer storage medium

InventorID:

3395160 ⎘