Schriesheim
Germany
14
2023-01-19
The entities that hold a legal rights for patent applications filed by inventor Rohrmann Hartmut:
Hartmut Rohrmann from Schriesheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods of and apparatus for magnetron sputtering
#2 | 2021-12-09Liquid sputter target
#3 | 2021-11-11PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS
#4 | 2021-02-18Methods of and apparatus for magnetron sputtering
#5 | 2020-12-10Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpiece
#6 | 2019-08-15SPUTTERING SOURCE
#7 | 2015-08-13PROCESSING ARRANGEMENT WITH TEMPERATURE CONDITIONING ARRANGEMENT AND METHOD OF PROCESSING A SUBSTRATE
#8 | 2013-07-18MAGNETRON SPUTTERING APPARATUS
#9 | 2012-02-09REACTIVE SPUTTERING WITH MULTIPLE SPUTTER SOURCES
#10 | 2011-08-04TARGET ASSEMBLY FOR A MAGNETRON SPUTTERING APPARATUS, A MAGNETRON SPUTTERING APPARATUS AND A METHOD OF USING THE MAGNETRON SPUTTERING APPARATUS
#11 | 2009-05-28Method for producing a directional layer by cathode sputtering, and device for implementing the method
#12 | 2008-12-18MULTITARGET SPUTTER SOURCE AND METHOD FOR THE DEPOSITION OF MULTI-LAYERS
#13 | 2007-06-28Target arrangement for mounting / dismounting and method of manufacturing
#14 | 2006-03-16Substrate processing system
340085 ⎘