San Jose, California
United States
12
2011-11-17
The entities that hold a legal rights for patent applications filed by inventor Pu Bryan:
Bryan Pu from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Pulsed bias plasma process to control microloading
#2 | 2011-06-23Method of controlling etch microloading for a tungsten-containing layer
#3 | 2008-12-04Method for reducing microloading in etching high aspect ratio structures
#4 | 2008-11-20Process to open carbon based hardmask overlying a dielectric layer
#5 | 2008-01-08Apparatus for uniformly etching a dielectric layer
#6 | 2007-11-01Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zones
#7 | 2007-11-01Plasma etch process using polymerizing etch gases and an inert diluent gas in independent gas injection zones to improve etch profile or etch rate uniformity
#8 | 2007-11-01Plasma etch process using polymerizing etch gases with different etch and polymer-deposition rates in different radial gas injection zones with time modulation
#9 | 2007-11-01Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of gas content
#10 | 2007-11-01Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zone
#11 | 2007-04-05Process to open carbon based hardmask
#12 | 2005-07-12Temperature controlled window with a fluid supply system
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