Mountain View, California
United States
11
2021-07-29
The entities that hold a legal rights for patent applications filed by inventor Brunner Rudolf:
Rudolf Brunner from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
#2 | 2018-06-21Plasma cell for providing VUV filtering in a laser-sustained plasma light source
#3 | 2017-05-25System and method for electrodeless plasma ignition in laser-sustained plasma light source
#4 | 2016-09-15Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
#5 | 2015-02-12Diode laser based broad band light sources for wafer inspection tools
#6 | 2015-01-15Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
#7 | 2014-06-19Flexible optical aperture mechanisms
#8 | 2014-03-06Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
#9 | 2013-12-26Diode laser based broad band light sources for wafer inspection tools
#10 | 2013-07-18Plasma cell for providing VUV filtering in a laser-sustained plasma light source
#11 | 2013-04-09Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping
341408 ⎘