Aalen
Germany
11
2014-10-02
The entities that hold a legal rights for patent applications filed by inventor Graupner Paul:
Paul Graupner from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method
#2 | 2013-07-18Projection exposure system and projection exposure method
#3 | 2012-08-02Lithographic apparatus and device manufacturing method
#4 | 2009-08-27Lithographic apparatus and device manufacturing method
#5 | 2009-01-22Lithographic apparatus and device manufacturing method
#6 | 2008-03-20Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
#7 | 2007-10-25Optical element for correction of aberration, and a lithographic apparatus comprising same
#8 | 2005-11-17Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
#9 | 2005-08-23Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
#10 | 2005-08-18Lithographic apparatus and device manufacturing method
#11 | 2005-05-26Lithographic apparatus and device manufacturing method
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