Koichi Murakami

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2011-09-22

Top Assignees for applications by Koichi Murakami

The entities that hold a legal rights for patent applications filed by inventor Murakami Koichi:

Koichi Murakami from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Electrode and plasma processing apparatus

Gas shower structure and substrate processing apparatus

Temperature control device for target substrate, temperature control method and plasma processing apparatus including same

InventorID:

3424680 ⎘