Nirasaki-shi
Japan
9
2011-09-22
The entities that hold a legal rights for patent applications filed by inventor KOBAYASHI Yoshiyuki:
Yoshiyuki KOBAYASHI from Nirasaki-shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate mounting and demounting method
#2 | 2011-07-07Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
#3 | 2009-05-28Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus
#4 | 2008-12-25TEMPERATURE CONTROL DEVICE
#5 | 2008-06-19METHOD FOR MANUFACTURING SUBSTRATE MOUNTING TABLE
#6 | 2008-06-19Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism
#7 | 2008-05-22Thermal spray powder, method for forming thermal spray coating, and plasma resistant member
#8 | 2007-10-04SUBSTRATE TRANSFERRING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
#9 | 2006-11-16Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
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