Oberkochen
Germany
6
2011-09-22
The entities that hold a legal rights for patent applications filed by inventor Lowisch Martin:
Martin Lowisch from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and lithography device with a mask reflecting light
#2 | 2009-10-29Masks, lithography device and semiconductor component
#3 | 2007-08-23Groupwise corrected objective
#4 | 2007-04-12Masks, lithography device and semiconductor component
#5 | 2007-02-15Projection objective
#6 | 2006-05-09Device manufacturing method and computer program
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