Phoenix, Arizona
United States
12
2011-11-10
The entities that hold a legal rights for patent applications filed by inventor Mitrovic Andrej:
Andrej Mitrovic from Phoenix, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Gas cluster ion beam system with cleaning apparatus
#2 | 2007-04-05Temperature control of plasma density probe
#3 | 2006-09-19Apparatus and method of improving impedance matching between an RF signal and a multi- segmented electrode
#4 | 2006-08-10Method and system for temperature control of a substrate
#5 | 2006-07-11Apparatus and method for determining clamping status of semiconductor wafer
#6 | 2006-07-11Method of and structure for controlling electrode temperature
#7 | 2005-09-01Plasma processing system and method
#8 | 2005-08-04Method and apparatus for determining chemistry of part's residual contamination
#9 | 2005-04-28Method of and apparatus for measuring and controlling substrate holder temperature using ultrasonic tomography
#10 | 2005-03-31System and method for using first-principles simulation to control a semiconductor manufacturing process
#11 | 2005-03-31System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool
#12 | 2005-03-31System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model
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