Aalen
Germany
13
2011-04-28
The entities that hold a legal rights for patent applications filed by inventor BROTSACK Markus:
Markus BROTSACK from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination system for microlithography
#2 | 2011-03-24Microlithographic exposure method as well as a projection exposure system for carrying out the method
#3 | 2009-02-12Microlithographic exposure method as well as a projection exposure system for carrying out the method
#4 | 2008-12-04PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
#5 | 2008-11-27PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
#6 | 2008-11-06Illumination System, In Particular For A Projection Exposure Machine In Semiconductor Lithography
#7 | 2008-01-17Illumination system for microlithography
#8 | 2007-07-19Illumination system for a microlithography projection exposure installation
#9 | 2006-07-06Optical beam transformation system and illumination system comprising an optical beam transformation system
#10 | 2006-06-15Illumination system for a microlithography projection exposure apparatus
#11 | 2006-03-09Illumination system for microlithography
#12 | 2005-10-13Projection objective for immersion lithography
#13 | 2005-07-07Microlithographic exposure method as well as a projection exposure system for carrying out the method
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