Herzogenaurach
Germany
8
2011-03-24
The entities that hold a legal rights for patent applications filed by inventor SCHWAB Markus:
Markus SCHWAB from Herzogenaurach, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Microlithographic exposure method as well as a projection exposure system for carrying out the method
#2 | 2010-01-07Illumination system of a microlithographic projection exposure apparatus
#3 | 2009-07-30Method of manufacturing a miniaturized device
#4 | 2009-02-12Microlithographic exposure method as well as a projection exposure system for carrying out the method
#5 | 2008-01-03Projection exposure apparatus and method for operating the same
#6 | 2007-02-01Polarization-optimized illumination system
#7 | 2006-07-06Method of manufacturing a miniaturized device
#8 | 2005-07-07Microlithographic exposure method as well as a projection exposure system for carrying out the method
3526231 ⎘