Ryo Nonaka

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2011-04-14

Top Assignees for applications by Ryo Nonaka

The entities that hold a legal rights for patent applications filed by inventor Nonaka Ryo:

Ryo Nonaka from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Temperature control system and temperature control method for substrate mounting table

Temperature control device for target substrate, temperature control method and plasma processing apparatus including same

Substrate processing system and substrate cleaning apparatus including a jetting apparatus

Surface processing apparatus

Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod

InventorID:

3532376 ⎘