Steenbergen
Netherlands
3
2011-06-02
The entities that hold a legal rights for patent applications filed by inventor Ham Erik Leonardus:
Erik Leonardus Ham from Steenbergen, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus
#2 | 2007-06-21Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus
#3 | 2006-06-22Lithographic apparatus and device manufacturing method
3539892 ⎘