Eindhoven
Netherlands
12
2011-06-02
The entities that hold a legal rights for patent applications filed by inventor Megens Henry:
Henry Megens from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Alignment systems and methods for lithographic systems
#2 | 2008-07-31Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
#3 | 2008-02-12Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
#4 | 2007-12-13Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus
#5 | 2007-08-02Alignment systems and methods for lithographic systems
#6 | 2006-05-04Alignment systems and methods for lithographic systems
#7 | 2006-04-27Alignment systems and methods for lithographic systems
#8 | 2006-04-20Alignment systems and methods for lithographic systems
#9 | 2006-04-20Alignment systems and methods for lithographic systems
#10 | 2006-04-20Alignment systems and methods for lithographic systems
#11 | 2006-01-05Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus
#12 | 2005-09-01Alignment systems and methods for lithographic systems
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