Andrei Mikhailovich Yakunin

City:

Eindhoven

Country:

Russian Federation

Published Applications:

Last publication date:

2011-09-01

Top Assignees for applications by Andrei Mikhailovich Yakunin

The entities that hold a legal rights for patent applications filed by inventor Yakunin Andrei Mikhailovich:

ASML Netherlands B.V. 2 Veldhoven, Netherlands

Recent patent applications by Yakunin Andrei Mikhailovich

Andrei Mikhailovich Yakunin from Eindhoven, RU has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2011-09-01

US20110211185A1

Physics

Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method

#2 | 2011-07-07

US20110164236A1

Physics

Radiation source and lithographic apparatus

InventorID:

3545621 ⎘