San Ramon, California
United States
5
2024-08-29
The entities that hold a legal rights for patent applications filed by inventor KAMP MICHAEL P.:
MICHAEL P. KAMP from San Ramon, US has applied for patents for these inventions. The list has both pending applications and granted patents:
HIGHER PRESSURE PURGE FOR IMPURITY REDUCTION IN RADICAL TREATMENT CHAMBER
#2 | 2024-05-30METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A RADICAL TREATMENT OPERATION PRIOR TO CONDUCTING AN ANNEALING OPERATION
#3 | 2023-04-27Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation
#4 | 2018-09-20Non-contact temperature calibration tool for a substrate support and method of using the same
#5 | 2013-01-17METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRATE PROCESSING SYSTEMS
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