Mountain View, California
United States
27
2024-09-12
The entities that hold a legal rights for patent applications filed by inventor TOBIN JEFFREY:
JEFFREY TOBIN from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO EPITAXIAL GROWTH
#2 | 2020-05-07Inductive plasma source with metallic shower head using b-field concentrator
#3 | 2019-12-19Method and apparatus for precleaning a substrate surface prior to epitaxial growth
#4 | 2019-06-27Showerhead design
#5 | 2019-03-21Method and apparatus for selective nitridation process
#6 | 2018-10-11Apparatus and methods for backside passivation
#7 | 2018-06-28Substrate transfer mechanisms
#8 | 2018-01-18Method and apparatus for precleaning a substrate surface prior to epitaxial growth
#9 | 2017-09-14Support cylinder for thermal processing chamber
#10 | 2017-07-06Inductive plasma source with metallic shower head using B-field concentrator
#11 | 2017-04-20Substrate carrier system
#12 | 2016-10-13Support cylinder for thermal processing chamber
#13 | 2016-07-28Susceptor design to eliminate deposition valleys in the wafer
#14 | 2016-07-14Substrate transfer mechanisms
#15 | 2015-11-19METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING AN ION SHIELD
#16 | 2015-11-19Showerhead design
#17 | 2015-02-19Support cylinder for thermal processing chamber
#18 | 2015-02-12Method and apparatus for precleaning a substrate surface prior to epitaxial growth
#19 | 2014-04-24Minimal contact edge ring for rapid thermal processing
#20 | 2014-04-17Minimal contact edge ring for rapid thermal processing
#21 | 2014-04-10Methods and apparatus for processing substrates using an ion shield
#22 | 2013-02-14Method and apparatus for selective nitridation process
#23 | 2013-01-17METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRATE PROCESSING SYSTEMS
#24 | 2013-01-17METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRATE PROCESSING SYSTEMS
#25 | 2011-11-17INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CONCENTRATOR
#26 | 2010-12-02METHODS FOR DETERMINING THE QUANTITY OF PRECURSOR IN AN AMPOULE
#27 | 2009-04-02ATOMIC LAYER DEPOSITION CHAMBER AND COMPONENTS
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