Beaverton, Oregon
United States
19
2019-08-22
The entities that hold a legal rights for patent applications filed by inventor Srinivasan Easwar:
Easwar Srinivasan from Beaverton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Temperature controlled showerhead
#2 | 2017-01-12Temperature controlled showerhead
#3 | 2015-09-17Method for depositing a chlorine-free conformal SiN film
#4 | 2014-07-31Plasma activated conformal film deposition
#5 | 2014-06-12Temperature controlled showerhead
#6 | 2014-05-22Method for depositing a chlorine-free conformal sin film
#7 | 2014-05-06Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
#8 | 2013-07-25Method for depositing a chlorine-free conformal sin film
#9 | 2011-10-25Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
#10 | 2011-10-20Plasma activated conformal film deposition
#11 | 2011-03-15PECVD methods for producing ultra low-k dielectric films using UV treatment
#12 | 2010-04-13Methods for producing low-stress carbon-doped oxide films with improved integration properties
#13 | 2009-11-24Method for improving mechanical properties of low dielectric constant materials
#14 | 2009-11-03Method to improve mechanical strength of low-K dielectric film using modulated UV exposure
#15 | 2009-04-16Temperature controlled showerhead
#16 | 2009-04-16Temperature controlled showerhead
#17 | 2009-04-16Temperature controlled showerhead
#18 | 2007-09-04Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties
#19 | 2007-08-07Method to improve mechanical strength of low-k dielectric film using modulated UV exposure
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