Koshi
Japan
77
2021-01-14
The entities that hold a legal rights for patent applications filed by inventor Yoshihara Kousuke:
Kousuke Yoshihara from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Liquid processing device and liquid processing method
#2 | 2020-02-27Substrate processing apparatus and method of adjusting substrate processing apparatus
#3 | 2020-02-27Developing treatment method, computer storage medium and developing treatment apparatus
#4 | 2019-08-22Solution treatment apparatus and cleaning method for solution treatment apparatus
#5 | 2018-12-20Film forming method, storage medium, and film forming system
#6 | 2018-12-06Coating film forming method, coating film forming apparatus, and storage medium
#7 | 2018-04-05Solution treatment apparatus and solution treatment method
#8 | 2018-03-15Processing liquid supplying apparatus and method of supplying processing liquid
#9 | 2017-10-19Solution treatment apparatus and solution treatment method
#10 | 2017-09-07Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium
#11 | 2017-06-15Substrate processing apparatus and method of adjusting substrate processing apparatus
#12 | 2017-05-18Coating film forming method, coating film forming apparatus, and storage medium
#13 | 2017-03-30Developing method, developing apparatus and storage medium
#14 | 2017-02-16Developing apparatus, developing method and storage medium
#15 | 2017-02-02Substrate treatment system
#16 | 2016-11-10Exposure apparatus, resist pattern forming method, and storage medium
#17 | 2016-06-16Coating method, computer storage medium and coating apparatus
#18 | 2016-06-09Liquid treatment apparatus and method and non-transitory storage medium
#19 | 2016-03-10Developing method, developing apparatus and storage medium
#20 | 2015-12-24Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control
#21 | 2015-12-10Film forming method, computer storage medium, and film forming system
#22 | 2015-10-01Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus
#23 | 2015-05-07Processing liquid supplying apparatus and method of supplying processing liquid
#24 | 2015-04-02Processing-liquid supply apparatus and processing-liquid supply method
#25 | 2015-02-05Developing apparatus, developing method and storage medium
#26 | 2015-02-05Developing method, developing apparatus and storage medium
#27 | 2015-01-01Coating film forming apparatus, coating film forming method, and recording medium
#28 | 2015-01-01Solution treatment apparatus and solution treatment method
#29 | 2014-12-04Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium
#30 | 2014-11-27Developing method for developing apparatus
#31 | 2014-10-09Substrate processing method, substrate processing apparatus and non-transitory storage medium
#32 | 2014-08-21Cover plate for wind mark control in spin coating process
#33 | 2014-06-26Liquid processing apparatus, liquid processing method, and storage medium for liquid process
#34 | 2014-02-06Coating treatment method and coating treatment apparatus
#35 | 2014-01-30Liquid processing apparatus, liquid processing method and storage medium for liquid processing
#36 | 2013-09-19Coating treatment method, coating treatment apparatus, and computer-readable storage medium
#37 | 2013-08-01Developing method
#38 | 2013-07-11Substrate cleaning method, substrate cleaning apparatus and storage medium for cleaning substrate
#39 | 2013-03-21Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus
#40 | 2012-11-01Coating and development treatment system with airflow control including control unit and movable airflow control plate
#41 | 2012-09-20Substrate cleaning method and substrate cleaning apparatus
#42 | 2012-03-15Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#43 | 2012-03-08Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#44 | 2012-02-09Coating treatment method
#45 | 2012-01-26Coating treatment method, non-transitory computer storage medium and coating treatment apparatus
#46 | 2011-11-03Developing method
#47 | 2011-10-13Coating treatment method, non-transitory computer storage medium and coating treatment apparatus
#48 | 2011-08-18Developing apparatus, developing method and storage medium
#49 | 2011-08-18Developing apparatus, developing method and storage medium
#50 | 2011-08-18Coating and developing apparatus, developing method and non-transitory medium
#51 | 2011-06-23Resist coating method and resist coating apparatus
#52 | 2011-06-02Developing device and developing method
#53 | 2011-04-28Developing apparatus, developing method and storage medium
#54 | 2011-02-24Rinsing method, developing method, developing system and computer-read storage medium
#55 | 2011-01-13Apparatus and method of forming an applied film
#56 | 2011-01-13Resist coating apparatus
#57 | 2010-12-30Developing apparatus and developing method
#58 | 2010-09-16Developing apparatus, developing method, and storage medium
#59 | 2010-08-26Developing method
#60 | 2010-08-19Coating method
#61 | 2010-05-06Coating treatment method, coating treatment apparatus, and computer-readable storage medium
#62 | 2009-12-17Developing method and developing apparatus
#63 | 2009-10-08Substrate cleaning method and substrate cleaning apparatus
#64 | 2009-05-21Development device and development method
#65 | 2009-04-02Coating treatment method, coating treatment apparatus, and computer-readable storage medium
#66 | 2009-02-05Developing method, developing apparatus and storage medium
#67 | 2008-06-19Coating film processing method and apparatus
#68 | 2008-03-20Coating treatment method
#69 | 2007-11-01Developing apparatus, developing processing method, developing processing program, and computer readable recording medium recording the program
#70 | 2007-09-20Protective film removing device, mixed chemical solution recovering method and program storage medium
#71 | 2007-08-09Coating and developing method, coating and developing system and storage medium
#72 | 2007-08-09Developing device and developing method
#73 | 2007-05-31Rinse method and developing apparatus
#74 | 2007-05-24Rinsing method, developing method, developing system and computer-read storage medium
#75 | 2007-04-26Resist coating method and resist coating apparatus
#76 | 2007-04-26Resist coating method and resist coating apparatus
#77 | 2007-03-29Apparatus and method of forming an applied film
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