Koshi
Japan
5
2021-12-16
The entities that hold a legal rights for patent applications filed by inventor Nakamura Hiroshi:
Hiroshi Nakamura from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, estimation method of substrate processing and recording medium
#2 | 2021-06-17Substrate treatment method and substrate treatment system
#3 | 2020-12-10Substrate inspection system, substrate inspection method and recording medium
#4 | 2011-08-18Substrate processing method
#5 | 2011-08-18Substrate treatment method
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