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Inventor profile of:

Norihiro Ito

City:

Koshi

Country:

Japan

Published Applications:

26

Last publication date:

2018-08-09

Top Assignees for applications by Norihiro Ito

The entities that hold a legal rights for patent applications filed by inventor Ito Norihiro:

TOKYO ELECTRON LIMITED 21 Tokyo, Japan
TOKYO ELECTRON LIMITED 6 Minato-ku, Japan
Tokyo Electron Limited 1 Minato-ku, Tokyo, Japan

Recent patent applications by Ito Norihiro

Norihiro Ito from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2018-08-09

US20180221925A1

Performing operations; transporting

Substrate processing apparatus, substrate processing method and recording medium

#2 | 2018-05-10

US20180130677A1

Substrate processing apparatus

#3 | 2018-02-01

US20180033656A1

Substrate processing apparatus and nozzle

#4 | 2015-11-05

US20150318192A1

Substrate processing apparatus, substrate processing method, and recording medium

#5 | 2014-05-22

US20140137902A1

Substrate processing apparatus

#6 | 2013-12-05

US20130319476A1

Liquid treatment apparatus and liquid treatment method

#7 | 2013-07-18

US20130180659A1

Liquid treatment apparatus

#8 | 2013-02-28

US20130048609A1

Liquid processing apparatus, liquid processing method and storage medium

#9 | 2013-01-17

US20130014786A1

Liquid process apparatus and liquid process method

#10 | 2013-01-17

US20130014784A1

Liquid process apparatus and liquid process method

#11 | 2013-01-10

US20130008872A1

Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup

#12 | 2012-12-13

US20120312332A1

Liquid processing apparatus, liquid processing method, and storage medium

#13 | 2011-09-01

US20110209560A1

Substrate processing method, storage medium storing program for executing the same, substrate processing apparatus, and fault detection method for differential pressure flowmeter

#14 | 2011-04-21

US20110089137A1

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein

#15 | 2011-02-03

US20110023909A1

Liquid processing apparatus, liquid processing method, and storage medium

#16 | 2010-08-26

US20100212701A1

Substrate processing apparatus, substrate processing method, and drain cup cleaning method

#17 | 2010-06-10

US20100144158A1

Liquid processing apparatus and liquid processing method

#18 | 2010-04-08

US20100083986A1

Liquid processing apparatus, liquid processing method, and storage medium

#19 | 2010-02-11

US20100031980A1

Performing operations; transporting

Liquid treatment apparatus

#20 | 2009-02-05

US20090031948A1

Substrate processing apparatus

#21 | 2008-07-24

US20080173333A1

Cleaning apparatus and method and computer readable medium

#22 | 2008-01-31

US20080023049A1

Liquid processing system

#23 | 2007-12-20

US20070289528A1

Liquid processing apparatus and method

#24 | 2007-12-20

US20070289527A1

Liquid processing apparatus

#25 | 2007-10-18

US20070240824A1

Liquid processing apparatus

#26 | 2007-10-18

US20070240638A1

Liquid processing apparatus

InventorID:

3565228 ⎘