Tetsuo Yoshida

City:

Nirasaki-shi

Country:

Japan

Published Applications:

Last publication date:

2011-09-08

Top Assignees for applications by Tetsuo Yoshida

The entities that hold a legal rights for patent applications filed by inventor Yoshida Tetsuo:

TOKYO ELECTRON LIMITED 5 Tokyo, Japan
TOKYO ELECTRON LIMITED 3 Minato-ku, Japan

Recent patent applications by Yoshida Tetsuo

Tetsuo Yoshida from Nirasaki-shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2011-09-08

US20110214813A1

Electricity

Plasma processing method and apparatus

#2 | 2010-06-03

US20100133234A1

Electricity

Plasma etching method

#3 | 2010-02-25

US20100043974A1

Electricity

PLASMA PROCESSING METHOD AND APPARATUS

#4 | 2006-03-02

US20060042754A1

Electricity

Plasma etching apparatus

#5 | 2006-01-05

US20060000803A1

Electricity

Plasma processing method and apparatus

#6 | 2005-12-08

US20050269292A1

Electricity

Plasma processing apparatus and method, and electrode plate for plasma processing apparatus

#7 | 2005-11-24

US20050257743A1

Electricity

Plasma processing apparatus and method

#8 | 2005-05-19

US20050103270A1

Electricity

Port structure in semiconductor processing system

InventorID:

3569167 ⎘