Nirasaki-shi
Japan
7
2011-09-08
The entities that hold a legal rights for patent applications filed by inventor Ooyabu Jun:
Jun Ooyabu from Nirasaki-shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing method and apparatus
#2 | 2010-02-25PLASMA PROCESSING METHOD AND APPARATUS
#3 | 2007-07-26Focus ring and plasma processing apparatus
#4 | 2006-01-05Plasma processing method and apparatus
#5 | 2005-12-08Plasma processing apparatus and method, and electrode plate for plasma processing apparatus
#6 | 2005-11-24Plasma processing apparatus and method
#7 | 2005-01-13Ring mechanism, and plasma processing device using the ring mechanism
3569170 ⎘