Ulm
Germany
3
2011-09-08
The entities that hold a legal rights for patent applications filed by inventor Theiler Thomas:
Thomas Theiler from Ulm, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Device and method for producing dielectric layers in microwave plasma
#2 | 2008-12-18Method for the thermal treatment of disk-shaped substrates
#3 | 2007-05-03Device and method for the reduction of particles in the thermal treatment of rotating substrates
3571065 ⎘