Patents-Review.com
🔗 Permalink
Assignee profile:

Mattson Technology, Inc.

City:

Fremont, California

Country:

United States

Published Applications:

221

Last publication date:

2024-11-21

Patent Grants:

215

Last grant date:

2026-05-19

Quarterly Mattson Technology, Inc. Patent Applications

Top Inventors for applications by Mattson Technology, Inc.

These are the the leading inventors for applications assigned to Mattson Technology, Inc.:

Recent patent applications by Mattson Technology, Inc.

Mattson Technology, Inc. based in Fremont, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2024-11-21 ✅ Patent 12,635,451 granted on 2026-05-19
US20240387205A1
Electricity

Support Plate for Localized Heating in Thermal Processing Systems

 #2 | 2024-10-17 ✅ Patent 12,412,758 granted on 2025-09-09
US20240347356A1
Electricity

Workpiece Processing Apparatus with Thermal Processing Systems

 #3 | 2024-10-10 ✅ Patent 12,400,831 granted on 2025-08-26
US20240339298A1
Electricity

Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP) Loads

 #4 | 2024-09-12 ✅ Patent 12,476,151 granted on 2025-11-18
US20240304502A1
Electricity

Preheat Processes for Millisecond Anneal System

 #5 | 2024-09-05 ✅ Patent 12,562,342 granted on 2026-02-24
US20240297019A1
Electricity

Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential

 #6 | 2024-08-22 ✅ Patent 12,261,073 granted on 2025-03-25
US20240282614A1
Electricity

Electrostatic chuck assembly for plasma processing apparatus

 #7 | 2024-06-27 ✅ Patent 12,308,209 granted on 2025-05-20
US20240212981A1
Electricity

Workpiece processing apparatus with plasma and thermal processing systems

 #8 | 2024-03-21 ✅ Patent 12,119,254 granted on 2024-10-15
US20240096680A1
Electricity

Electrostatic chuck assembly for plasma processing apparatus

 #9 | 2024-02-29 ✅ Patent 12,347,677 granted on 2025-07-01
US20240071754A1
Electricity

Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing

 #10 | 2024-02-15 ✅ Patent 12,183,558 granted on 2024-12-31
US20240055242A1
Electricity

Workpiece processing apparatus with thermal processing systems

 #11 | 2023-11-02 ✅ Patent 12,119,216 granted on 2024-10-15
US20230352294A1
Electricity

Arc lamp with forming gas for thermal processing systems

 #12 | 2023-08-31 ✅ Patent 12,174,616 granted on 2024-12-24
US20230273596A1
Physics

Control system for adaptive control of a thermal processing system

 #13 | 2023-07-20 ✅ Patent 11,955,388 granted on 2024-04-09
US20230230887A1
Electricity

Transmission-based temperature measurement of a workpiece in a thermal processing system

 #14 | 2023-03-30 ✅ Patent 12,014,920 granted on 2024-06-18
US20230099054A1
Electricity

Apparatus for hydrogen assisted atmospheric radical oxidation

 #15 | 2023-03-30 ✅ Patent 12,080,568 granted on 2024-09-03
US20230098442A1
Electricity

Support plate for localized heating in thermal processing systems

 #16 | 2023-03-09 ✅ Patent 12,603,256 granted on 2026-04-14
US20230071494A1
Electricity

Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus

 #17 | 2023-02-09 ✅ Patent 11,923,215 granted on 2024-03-05
US20230041905A1
Electricity

Systems and methods for workpiece processing

 #18 | 2023-01-19 ✅ Patent 12,347,661 granted on 2025-07-01
US20230012873A1
Electricity

Pressure Control System for a Multi-Head Processing Chamber of a Plasma Processing Apparatus

 #19 | 2023-01-12 ✅ Patent 12,009,184 granted on 2024-06-11
US20230010075A1
Electricity

Lift pin assembly for a plasma processing apparatus

 #20 | 2023-01-05 ✅ Patent 11,837,493 granted on 2023-12-05
US20230005778A1
Electricity

Electrostatic chuck assembly for plasma processing apparatus

 #21 | 2023-01-05 ✅ Patent 12,087,608 granted on 2024-09-10
US20230005772A1
Electricity

Transfer apparatus and processing system

 #22 | 2023-01-05 ✅ Patent 12,009,220 granted on 2024-06-11
US20230005752A1
Electricity

Method for processing workpiece, plasma processing apparatus and semiconductor device

 #23 | 2022-12-29 ✅ Patent 12,417,900 granted on 2025-09-16
US20220415619A1
Electricity

Plasma Processing Apparatus

 #24 | 2022-12-01 ✅ Patent 12,266,503 granted on 2025-04-01
US20220384144A1
Electricity

Hybrid plasma source array

 #25 | 2022-10-27 ✅ Patent 12,040,159 granted on 2024-07-16
US20220344130A1
Electricity

Dual frequency matching circuit for inductively coupled plasma (ICP) loads

 #26 | 2022-09-29 ✅ Patent 11,848,204 granted on 2023-12-19
US20220310359A1
Electricity

Enhanced ignition in inductively coupled plasmas for workpiece processing

 #27 | 2022-06-30 ✅ Patent 12,002,701 granted on 2024-06-04
US20220208591A1
Electricity

Electrostatic chuck assembly for plasma processing apparatus

 #28 | 2022-06-30 ✅ Patent 12,046,489 granted on 2024-07-23
US20220208572A1
Electricity

Workpiece processing apparatus with thermal processing systems

 #29 | 2022-06-30 ✅ Patent 12,334,312 granted on 2025-06-17
US20220208529A1
Electricity

Configurable Faraday Shield

 #30 | 2022-06-30 ✅ Patent 12,159,770 granted on 2024-12-03
US20220208527A1
Electricity

Cooled shield for ICP source

 #31 | 2022-06-30 ✅ Patent 12,340,981 granted on 2025-06-24
US20220208523A1
Electricity

Workpiece Processing Apparatus with Outer Gas Channel Insert

 #32 | 2022-06-30 ✅ Patent 12,580,157 granted on 2026-03-17
US20220208514A1
Electricity

Grid Assembly for Plasma Processing Apparatus

 #33 | 2022-06-30 ✅ Patent 12,476,077 granted on 2025-11-18
US20220208512A1
Electricity

Induction Coil Assembly for Plasma Processing Apparatus

 #34 | 2022-06-30 ✅ Patent 12,352,306 granted on 2025-07-08
US20220205478A1
Mechanical engineering

Workpiece Support For A Thermal Processing System

 #35 | 2022-06-16 ✅ Patent 11,837,447 granted on 2023-12-05
US20220189747A1
Electricity

Workpiece processing apparatus with plasma and thermal processing systems

 #36 | 2022-06-16 ✅ Patent 11,955,315 granted on 2024-04-09
US20220189737A1
Electricity

Workpiece processing apparatus with plasma and thermal processing systems

 #37 | 2022-06-16 ✅ Patent 12,535,273 granted on 2026-01-27
US20220187021A1
Mechanical engineering

Workpiece Processing Apparatus with Thermal Processing Systems

 #38 | 2022-05-26 ✅ Patent 11,721,539 granted on 2023-08-08
US20220165561A1
Electricity

Arc lamp with forming gas for thermal processing systems

 #39 | 2022-03-17 ✅ Patent 11,791,166 granted on 2023-10-17
US20220084839A1
Electricity

Selective etch process using hydrofluoric acid and ozone gases

 #40 | 2022-03-17 ✅ Patent 12,002,652 granted on 2024-06-04
US20220084792A1
Electricity

Variable mode plasma chamber utilizing tunable plasma potential

 #41 | 2022-03-03 ✅ Patent 12,283,467 granted on 2025-04-22
US20220068611A1
Electricity

Plasma strip tool with movable insert

 #42 | 2022-02-24 ✅ Patent 12,068,177 granted on 2024-08-20
US20220059371A1
Electricity

Rapid thermal processing system with cooling system

 #43 | 2021-11-25 ✅ Patent 11,315,801 granted on 2022-04-26
US20210366727A1
Electricity

Processing of workpieces using ozone gas and hydrogen radicals

 #44 | 2021-11-04 ✅ Patent 12,159,789 granted on 2024-12-03
US20210343541A1
Electricity

Atomic layer etch process using plasma in conjunction with a rapid thermal activation process

 #45 | 2021-09-30 ✅ Patent 12,120,780 granted on 2024-10-15
US20210307115A1
Electricity

Nitrogen injection for arc lamps

 #46 | 2021-09-30 ✅ Patent 11,651,977 granted on 2023-05-16
US20210305071A1
Electricity

Processing of workpieces using fluorocarbon plasma

 #47 | 2021-09-02 ✅ Patent 11,610,824 granted on 2023-03-21
US20210272858A1
Electricity

Transmission-based temperature measurement of a workpiece in a thermal processing system

 #48 | 2021-07-01 ✅ Patent 11,626,269 granted on 2023-04-11
US20210202214A1
Electricity

Chamber seasoning to improve etch uniformity by reducing chemistry

 #49 | 2021-06-24 ✅ Patent 11,482,434 granted on 2022-10-25
US20210193489A1
Electricity

Systems and methods for workpiece processing

 #50 | 2021-05-06 ✅ Patent 11,644,817 granted on 2023-05-09
US20210132592A1
Physics

Control system for adaptive control of a thermal processing system

 #51 | 2021-04-22 ✅ Patent 11,183,397 granted on 2021-11-23
US20210118694A1
Electricity

Selective etch process using hydrofluoric acid and ozone gases

 #52 | 2021-04-15 ✅ Patent 12,148,608 granted on 2024-11-19
US20210111017A1
Electricity

Post etch defluorination process

 #53 | 2021-03-18 ✅ Patent 11,791,181 granted on 2023-10-17
US20210082724A1
Electricity

Methods for the treatment of workpieces

 #54 | 2021-03-04 ✅ Patent 11,251,050 granted on 2022-02-15
US20210066088A1
Electricity

Silicon oxide selective dry etch process

 #55 | 2021-03-04 ✅ Patent 11,257,680 granted on 2022-02-22
US20210066085A1
Electricity

Methods for processing a workpiece using fluorine radicals

 #56 | 2021-03-04 ✅ Patent 10,950,428 granted on 2021-03-16
US20210066074A1
Electricity

Method for processing a workpiece

 #57 | 2021-03-04 ✅ Patent 11,276,560 granted on 2022-03-15
US20210066047A1
Electricity

Spacer etching process

 #58 | 2021-02-18 ✅ Patent 11,348,784 granted on 2022-05-31
US20210050213A1
Electricity

Enhanced ignition in inductively coupled plasmas for workpiece processing

 #59 | 2021-01-21 ✅ Patent 11,462,413 granted on 2022-10-04
US20210020445A1
Electricity

Processing of workpieces using deposition process and etch process

 #60 | 2021-01-21 ✅ Patent 11,164,727 granted on 2021-11-02
US20210020413A1
Electricity

Processing of workpieces using hydrogen radicals and ozone gas

 #61 | 2021-01-21 ✅ Patent 11,189,464 granted on 2021-11-30
US20210020411A1
Electricity

Variable mode plasma chamber utilizing tunable plasma potential

 #62 | 2021-01-21 ✅ Patent 11,049,692 granted on 2021-06-29
US20210020404A1
Electricity

Methods for tuning plasma potential using variable mode plasma chamber

 #63 | 2021-01-07 ✅ Patent 11,195,718 granted on 2021-12-07
US20210005456A1
Electricity

Spacer open process by dual plasma

 #64 | 2020-12-17 ✅ Patent 11,812,523 granted on 2023-11-07
US20200396798A1
Electricity

Thermal processing system with transmission switch plate

 #65 | 2020-11-26 ✅ Patent 11,495,437 granted on 2022-11-08
US20200373129A1
Electricity

Surface pretreatment process to improve quality of oxide films produced by remote plasma

 #66 | 2020-11-19 ✅ Patent 11,508,560 granted on 2022-11-22
US20200365405A1
Electricity

Focus ring adjustment assembly of a system for processing workpieces under vacuum

 #67 | 2020-11-19 ✅ Patent 11,348,767 granted on 2022-05-31
US20200365377A1
Electricity

Plasma processing apparatus having a focus ring adjustment assembly

 #68 | 2020-11-19 ✅ Patent 11,515,127 granted on 2022-11-29
US20200361094A1
Performing operations; transporting

End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum

 #69 | 2020-11-05 ✅ Patent 12,027,427 granted on 2024-07-02
US20200350217A1
Electricity

Preheat processes for millisecond anneal system

 #70 | 2020-11-05 ✅ Patent 11,164,742 granted on 2021-11-02
US20200350161A1
Electricity

Selective deposition using methylation treatment

 #71 | 2020-11-05 ✅ Patent 11,521,847 granted on 2022-12-06
US20200350158A1
Electricity

Hydrogen assisted atmospheric radical oxidation

 #72 | 2020-09-24 ✅ Patent 11,101,142 granted on 2021-08-24
US20200303206A1
Electricity

Pre-heat processes for millisecond anneal system

 #73 | 2020-09-17 ✅ Patent 11,699,603 granted on 2023-07-11
US20200294826A1
Electricity

Thermal processing system with temperature non-uniformity control

 #74 | 2020-07-30 ✅ Patent 11,039,527 granted on 2021-06-15
US20200245444A1
Electricity

Air leak detection in plasma processing apparatus with separation grid

 #75 | 2020-07-23 ✅ Patent 11,764,072 granted on 2023-09-19
US20200234983A1
Electricity

Method for processing a workpiece using a multi-cycle thermal treatment process

 #76 | 2020-07-23 ✅ Patent 11,043,393 granted on 2021-06-22
US20200234969A1
Electricity

Ozone treatment for selective silicon nitride etch over silicon

 #77 | 2020-07-09 ✅ Patent 10,901,321 granted on 2021-01-26
US20200218158A1
Physics

Strip process for high aspect ratio structure

 #78 | 2020-06-25 ✅ Patent 11,387,115 granted on 2022-07-12
US20200203182A1
Electricity

Silicon mandrel etch after native oxide punch-through

 #79 | 2020-06-25 ✅ Patent 11,062,912 granted on 2021-07-13
US20200203175A1
Electricity

Atomic layer etch process using plasma in conjunction with a rapid thermal activation process

 #80 | 2020-06-25 ✅ Patent 11,107,695 granted on 2021-08-31
US20200203173A1
Electricity

Surface smoothing of workpieces

 #81 | 2020-06-23 ✅ Patent 10,692,730 granted on 2020-06-23
US16557346
Electricity

Silicon oxide selective dry etch process

 #82 | 2020-06-18 ✅ Patent 11,264,249 granted on 2022-03-01
US20200194277A1
Electricity

Carbon containing hardmask removal process using sulfur containing process gas

 #83 | 2020-06-11 ✅ Patent 10,964,528 granted on 2021-03-30
US20200185216A1
Electricity

Integration of materials removal and surface treatment in semiconductor device fabrication

 #84 | 2020-06-04 ✅ Patent 11,257,696 granted on 2022-02-22
US20200176288A1
Electricity

Systems and methods for workpiece processing

 #85 | 2020-05-21 ✅ Patent 10,950,416 granted on 2021-03-16
US20200161094A1
Electricity

Chamber seasoning to improve etch uniformity by reducing chemistry

 #86 | 2020-03-26 ✅ Patent 11,107,693 granted on 2021-08-31
US20200098576A1
Electricity

Method for high aspect ratio photoresist removal in pure reducing plasma

 #87 | 2020-02-27 ✅ Patent 12,399,064 granted on 2025-08-26
US20200064198A1
Physics

Systems And Methods For Thermal Processing And Temperature Measurement Of A Workpiece At Low Temperatures

 #88 | 2020-02-06 ✅ Patent 11,251,075 granted on 2022-02-15
US20200043775A1
Electricity

Systems and methods for workpiece processing using neutral atom beams

 #89 | 2019-12-26 ✅ Patent 10,872,761 granted on 2020-12-22
US20190393027A1
Electricity

Post etch defluorination process

 #90 | 2019-12-19 ✅ Patent 10,573,532 granted on 2020-02-25
US20190385862A1
Electricity

Method for processing a workpiece using a multi-cycle thermal treatment process

 #91 | 2019-12-19 ✅ Patent 11,586,113 granted on 2023-02-21
US20190384178A1
Physics

Methods and apparatus for post exposure bake processing of a workpiece

 #92 | 2019-12-12 ✅ Patent 11,164,725 granted on 2021-11-02
US20190378692A1
Electricity

Generation of hydrogen reactive species for processing of workpieces

 #93 | 2019-10-17 ✅ Patent 11,387,111 granted on 2022-07-12
US20190318937A1
Electricity

Processing of workpieces with reactive species generated using alkyl halide

 #94 | 2019-10-17 ✅ Patent 10,760,976 granted on 2020-09-01
US20190316972A1
Physics

Thermal imaging of heat sources in thermal processing systems

 #95 | 2019-10-03 ✅ Patent 11,062,910 granted on 2021-07-13
US20190304793A1
Electricity

Surface treatment of silicon or silicon germanium surfaces using organic radicals

 #96 | 2019-09-26 ✅ Patent 11,521,868 granted on 2022-12-06
US20190295869A1
Electricity

Support plate for localized heating in thermal processing systems

 #97 | 2019-09-03 ✅ Patent 10,403,492 granted on 2019-09-03
US16216006
Electricity

Integration of materials removal and surface treatment in semiconductor device fabrication

 #98 | 2019-07-18 ✅ Patent 10,388,552 granted on 2019-08-20
US20190221462A1
Electricity

Substrate breakage detection in a thermal processing system

 #99 | 2019-07-18 ✅ Patent 10,679,864 granted on 2020-06-09
US20190221442A1
Electricity

Pre-heat processes for millisecond anneal system

 #100 | 2019-06-20 ✅ Patent 11,289,323 granted on 2022-03-29
US20190189479A1
Electricity

Processing of semiconductors using vaporized solvents

Also check out Mattson Technology, Inc.'s (Fremont, United States) applicant profile with 175 patent applications submitted.

AssigneeID:

6985 ⎘